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Silicon Carbide Ultra-Stable Structures

Semiconductor Opto Machanic

SEMICONDUCTOR AND OPTOMECHANICAL EQUIPMENT

BOOSTEC® SiC Solutions are used where ultra-precision is required, in:

  • Semiconductor industry processes,
  • EUV lithography machines,
  • Advanced measuring instruments for optical surfaces,
  • Ultra-high vacuum,
  • Scientific equipment.

BOOSTEC EXPERTISE IN MANUFACTURING & DESIGN

  • Unique experience in manufacturing 3-meter class ultra-stable structures
  • Possibility of integrated solution on a single part: air bearing system, cooling with internal channels, mirror
  • From monolithic SiC parts to possibly complex assemblies, Mersen Boostec manufactures highly stable benches, baseplates, beams, sliding structures for fast and accurate positioning, chucks

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